In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May, 1999, Edinburgh, Scotland / Kostas Amberiadis [and others], chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, [and] Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise [and] Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers.

Format
Book
Language
English
Published/​Created
Bellingham, Wash., USA : SPIE, [1999], ©1999.
Description
viii, 344 pages : illustrations ; 28 cm.

Available Online

Copies in the Library

Location Call Number Status
ReCAP - Remote StorageTK7874 .I463 1999g Browse related items Request

    Details

    Subject(s)
    Related name
    Series
    • Proceedings of SPIE--the International Society for Optical Engineering ; v. 3743. [More in this series]
    • Europto series. [More in this series]
    • Proceedings EurOpt series
    • Proceedings / SPIE--the International Society for Optical Engineering ; v. 3743
    Bibliographic references
    Includes bibliographic references and author index.
    ISBN
    0819432237
    OCLC
    41549721
    RCP
    C - S
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