In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing [electronic resource] : 19-21 May, 1999, Edinburgh, Scotland / Kostas Amberiadis ... [et al.], chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, [and] Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise [and] Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers.

Format
Book
Language
English
Published/​Created
Bellingham, Wash., USA : SPIE, c1999.
Description
viii, 344 p. : ill. ; 28 cm.

Available Online

Details

Subject(s)
Related name
Series
  • Europto series [More in this series]
  • Proceedings of SPIE--the International Society for Optical Engineering ; v. 3743. [More in this series]
  • Proceedings EurOpt series
  • Proceedings / SPIE--the International Society for Optical Engineering ; v. 3743
Bibliographic references
Includes bibliographical references and author index.
Reproduction note
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Other format(s)
Also available in print.
Other title(s)
SPIE digital library.
OCLC
53835361
Statement on language in description
Princeton University Library aims to describe library materials in a manner that is respectful to the individuals and communities who create, use, and are represented in the collections we manage. Read more...
Other views
Staff view