SESA Rt-CVD Si/Si1-xGex/Si HBT Selective Epitaxy & Self-Alignment Rapid Thermal Chemical Vapor Deposition Si/Si1-xGex/Si Heterojunction Bipolar Transistor

Author/​Artist
Rim, Kern [Browse]
Format
Senior thesis
Language
English
Description
69 Pages

Details

Advisor(s)
Sturm, James C. [Browse]
Department
Princeton University. Department of Electrical Engineering [Browse]
Class year
1993
Restrictions note
This thesis can be viewed in person at the Mudd Manuscript Library. To order a copy complete the Senior Thesis Request Form. For more information contact mudd@princeton.edu.

Supplementary Information