Microlithography : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith.

Format
Book
Language
English
Εdition
2nd ed.
Published/​Created
Boca Raton : CRC Press, c2007.
Description
848 p. : ill. ; 27 cm.

Details

Subject(s)
Related name
Series
  • Optical science and engineering (Boca Raton, Fla.) ; 126. [More in this series]
  • Optical science and engineering ; 126
Bibliographic references
Includes bibliographical references and index.
ISBN
  • 9780824790240 (alk. paper)
  • 0824790243 (alk. paper)
LCCN
2006031516
OCLC
71581976
RCP
N - S