Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.

Format
Journal
Language
English
Published/​Created
New York : Published for the Society by the American Institute of Physics, ©1991-
Description
  • volumes : illustrations ; 29 cm
  • 2nd ser., v. 9, no. 1 (Jan./Feb. 1991)-

Details

Subject(s)
Related name
Continues
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Frequency
Bimonthly
Linking notes
  • Includes: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, and: North American Conference on Molecular Beam Epitaxy. Papers from the ... North American Conference on Molecular Beam Epitaxy, also published separately.
  • Includes as the Nov./Dec. issue, 1993- : International Symposium on Electron, Ion, and Photon Beams. Papers from the ... International Symposium on Electron, Ion, and Photon Beams.
  • Includes an issue: U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds. Proceedings of the ... U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds.
  • One special issue each year contains the Proceedings of the ... International Vacuum Microelectronics Conference; which is also published as a separate publication.
Notes
  • Title from cover.
  • On cover, <Sept./Oct. 1994->: JVST B.
Other format(s)
Vols. for <Jan. 1995- > available also in PDF and PostScript formats via the WWW; abstracts also available <1983-> in HTML format via World Wide Web searchable database; restricted to institutions with a site/user ID and password.
Other title(s)
  • J. vac. sci. technol., B, Microelectron. nanometer struct. process. meas. phenom.
  • Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
  • Microelectronics and nanometer structures
  • Journal of vacuum science and technology. B, Microelectronics and nanometer structures
  • JVST B
ISSN
1071-1023
LCCN
94657460
OCLC
23276603
RCP
C - O
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