Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG / Wolfgang Karthe, chair/editor ; sponsored by the Commission of the European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE-the International Society for Optical Engineering.

Format
Book
Language
English
Published/​Created
Bellingham, Wash. : SPIE, c1994.
Description
ix, 334 p. : ill. ; 28 cm.

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ReCAP - Remote StorageTA1750 .N366 1994 Browse related items Request

    Details

    Subject(s)
    Series
    Bibliographic references
    Includes bibliographical references and index.
    ISBN
    0819415170
    LCCN
    94065766
    OCLC
    30930657
    Statement on language in description
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