Details

Subject(s)

• Production scheduling [Browse]
• Semiconductor wafers [Browse]

Related name

• 秦威. [Browse]
• 吴立辉 [Browse]

Summary note

This book is a comprehensive guide focusing on the scheduling of automated material transportation systems within semiconductor wafer manufacturing. It addresses the challenges of large-scale, stochastic, real-time, and multi-objective scheduling problems. The authors delve into system modeling, optimization methods, and performance evaluation techniques, providing theoretical foundations for research institutions and industry professionals. The book is also suitable as a reference for students in mechanical engineering, industrial engineering, automation, and computer engineering. It aims to advance scheduling methods in wafer manufacturing to improve productivity and efficiency in semiconductor processes.

Notes

Description based upon print version of record.

Source of description

• Description based on publisher supplied metadata and other sources.
• Part of the metadata in this record was created by AI, based on the text of the resource.

Contents

晶圆制 动化物料 系统 度f1; 24-晶圆制 动化 正文 ; 晶圆制 动化 前 .pdf; 正文目录.pdf; 晶圆制 动化 正文 .pdf

ISBN

• 9787568009027
• 7568009025

OCLC

946310448

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