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Princeton University Library Catalog
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Developments in semiconductor microlithography IV : 23-24 April 1979, San Jose, United States / editor, James W. Dey ; sponsored by SPIE.
Format
Book
Language
English
Published/Created
Bellingham, Washington : SPIE, 1979.
Description
1 online resource (vi, 194 pages).
Details
Subject(s)
Semiconductors
—
Congresses
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Photolithography
—
Congresses
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Editor
Dey, James W.
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Sponsoring body
Society of Photo-optical Instrumentation Engineers
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Series
Proceedings of SPIE--the International Society for Optical Engineering ; Volume 0174.
[More in this series]
Proceedings of SPIE ; Volume 0174
Source of description
Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 7, 2018).
Statement on language in description
Princeton University Library aims to describe library materials in a manner that is respectful to the individuals and communities who create, use, and are represented in the collections we manage.
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Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California / Jim Dey, editor ; cooperating organization, Northern California Microphotomask/Masking Working Group.
id
99253953506421
